Micromachining

Machining in sub micron dimensions: a task for the excimer laser Micromechanical structures are gaining more and more importance, demanding new micro fabrication tools. It often is desirable to build microstructures in many materials. As sizes fall into the sub-micron range, mechanical approaches to cutting, drilling and processing materials like metal, ceramic glass or diamonds must be replaced by laser beam techniques. Some examples of these applications are: Miniaturizing components in electronic products and modern medical devices Manufacturing micromotors that are as small as a human hair Ablating glass for applications in optics Machining of ceramics that are needed in actuators and high temperature components Drilling of implantable medical devices and complex catheters with miniature wires, fibers, probes and sensors that are used for minimal invasive surgical and diagnostic procedures Micromachining applications   3D Micro Structuring Marking Microholes Rapid Prototyping Wire Stripping Drilling of Glass The examples show different structures in different materials cut out with the excimer laser (Images courtesy of FHG ILT Aachen):